Browsing by Author Marks, N A

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Issue DateTitleAuthor(s)Citation
2016Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionizationBilek, Marcela; Ganesan, Rajesh; McKenzie, David; Marks, N A; McCulloch, D G; Partridge, Jim; Stueber, M; Tucker, Mark; Ulrich, S; Physics; Physics; PhysicsMixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization, Journal of Applied Physics, vol.119, 15, 2016,pp 1-6